MCG 4137 Micro and Nano Systems
3 crédits
Genie mecanique
Faculte de genie
Fundamental principles governing micro and nano systems, case study of selected applications, and overview of semiconductor micro and nano fabrication techniques. Topics include statics and dynamics at reduced dimensions, electrostatic actuation techniques, nanomechanical resonators, and fundamental performance limits imposed by the equipartition theorem and the fluctuation dissipation theorem.
Volet:
Cours magistral
Terme proposées précédemment:
Automne
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