MCG 5120 Micro and Nano Systems
3 units
Mechanical Engineering
Faculty of Engineering
Fundamental principles governing micro and nano systems, case study of selected applications, and overview of semiconductor micro and nano fabrication techniques. Topics include statics and dynamics at reduced dimensions, electrostatic actuation techniques, nanomechanical resonators, and fundamental performance limits imposed by the equipartition theorem and the fluctuation dissipation theorem.
Components:
Lecture
Previously Offered Terms:
Fall